Product Summary:
An accurate and automated supply of liquids is imperative in wafer dicing. The ADU-14E1® series was designed to achieve intelligent management of liquid supply, with which users can determine the exact flow and ratio of liquid that is supplied to their wafer dicing systems, and remotely monitor the operations of the machines.
Product Highlights:
- Achieve IN LINE operations with dicing saws.
- Designs to fit 1-to-1, 1-to-2, and 1-to-4 modules.
- Compact size, with FOOT PRINT at 416x706mm (including leaking tray)
- Suitable for wafer dicing saws of all sizes (see customer successes below)
- Meets SEMI-S2 standards
- 7 inch touch screen interface that is user-friendly, intuitive, and easy to learn. Production parameters are easily accessed.
- Full time pumps monitoring, equipped with alarms and termination functions when abnormalities occur.
- Full time auto self-calibration, accurate and economical supply of liquid.
- Alternative Mode:
Metering mode: Fixed pump flow.
Rating mode:-amount or fixed- dilution rate – pump flow will be self-adjusted when dicing flow is varying. - Available functions include activation based on recipesparameters, designated flow, and automated management
- AHC (Auto Hose Clean) upgrades allow automatic cleaning the hose in wafer dicing upon completion of wafer dicing.
- Resistivity monitoring upgrades allows for remote monitoring of resistivity
- Centralized liquid supply control upgrades allows for automated refuel and supply of liquid across manufacturing facilities.
- Prevent mishandling with passcodes locks
- Traceable and searchable LOG file.
- Support Ethernet access, achieve remote operations, file downloads, and real-time monitoring
- Specialized software web dispenser2.0 and exclusive SECS/GEM packages designed for remote management.
- Languages available: Mandarin Chinese, English
- Patents awarded in Taiwan for invention, innovation, and design.
Comparison with other products:
左右滑動查看更多| Product： | Others | ADU-14E1 |
| Basic functionality comparison | ||
| Low Liquid Alarm | V | V |
| IN LINE operations with dicing | V | |
| Pump fail monitoring (malfunction, insufficient flow, burn out, air suction) | V | |
| Alarms and termination functions when abnormalities occur (including forgetting to turn on machines, interrupted signals, power source disruptions, or low liquid levels) | V | |
| Full time self calibrations | V | |
| Simple touch-screen interface | V | |
| Error prevention passcode lock | V | |
| Pump flow display | V | |
| Dicing water flow display(L/m) | V | |
| Dilution ratio display | V | |
| Alternative Mode: Metering /Rating | V | |
| LOG records | V | |
| Internet and remote management functions (web dispenser2.0 software or exclusive SECS/GEM packages) | V | |
| Available upgrades | ||
| Resistivity display upon liquid supply | V | |
| Centralized liquid supply Trigger | V | |
| AHC（Auto Hose Clean）Auto Hose Clean function for automated cleaning of wafer dicing systems | V | |
Appearance and dimension:
Customer success:
Compatible with all types of dicing saw, both new and old.
Diagram of connection
Simple, user-friendly, easy-to-learn operation interface:
(Patented)
Web dispenser2.0 Remote management interface:
Traceable Log file can be produced at any time:
